I could not resist

Resists for Electron Beam Lithography (EBL)

N00DL3

Playlists: 'rc3' videos starting here / audio

Photoresists are one of the essential ingredients for chip manufacturing and micro/nano engineering.
We will show how we’re using them in a DIY Electron Beam Lithography set-up and how you’re able to cook your own cheap resists and mix your own developers.

Resists? What's that?


EBL? What's that?


DIY cooking of PMMA based resists


Composition of different developers


Applications



The EBL exposure process



Stuff comes together


More Examples

Thanks & Credits

Q & A

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